Preparation and superconducting properties of ultrathin YBa2Cu3O7−x films

X. Xi,J. Geerk,G. Linker,Qi Li,O. Meyer
DOI: https://doi.org/10.1063/1.101530
1989-06-05
Abstract:Ultrathin films of YBa2Cu3O7−x with thicknesses down to 2 nm were grown on(100)SrTiO3 and (100)MgO by inverted cylindrical magnetron sputtering. Metallic behavior and zero resistance temperatures above 4.2 K were obtained in 3‐nm‐thick films on SrTiO3. Thinner films revealed temperature‐activated conductivity and only partial transitions to superconductivity due to inhomogeneities in the film morphology. On MgO, the critical film thickness leading to deteriorations of the transport properties was 6 nm. An analysis of the fluctuation‐enhanced conductivity near Tc in terms of the Aslamazov–Larkin theory [Phys. Lett. A 26, 238 (1968)] revealed three‐dimensional behavior even in the thinnest fully superconducting films.
Materials Science
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