Impact of Charges at Ferroelectric/Interlayer Interface on Depolarization Field of Ferroelectric FET With Metal/Ferroelectric/Interlayer/Si Gate-Stack

Xiaolei Wang,Xiaoqing Sun,Yuanyuan Zhang,Lixing Zhou,Jinjuan Xiang,Xueli Ma,Hong Yang,Yongliang Li,Kai Han,Jun Luo,Chao Zhao,Wenwu Wang
DOI: https://doi.org/10.1109/ted.2020.3017569
IF: 3.1
2020-10-01
IEEE Transactions on Electron Devices
Abstract:This article theoretically investigates the impact of charges at the ferroelectric/interlayer interface on the depolarization field of ferroelectric FET (FeFET) with metal/ferroelectric/interlayer/Si gate structure. The interfacial charges include fixed charges and trapped/detrapped charges. We find that the positive or negative interfacial charges (~10<sup>13</sup> cm<sup>−2</sup>) can align the directions of the depolarization field and corresponding polarization in the ferroelectric. This article may provide insight into the device design of FeFET.
engineering, electrical & electronic,physics, applied
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