In-Memory Computing Primitive for Sensor Data Fusion in 28 nm HKMG FeFET Technology

M. Jerry,Sourav Dutta,A. K. Saha,Jeffrey A. Smith,S. Datta,S. Gupta,B. Grisafe,Kai Ni,W. Chakraborty
DOI: https://doi.org/10.1109/IEDM.2018.8614527
2018-12-01
Abstract:In this work, we exploit the spatio-temporal switching dynamics of ferroelectric polarization to realize an energy-efficient, and massively-parallel in-memory computational primitive for at-node sensor data fusion and analytics based on an industrial 28nm HKMG FeFET technology [1]. We demonstrate: (i) the spatio-temporal dynamics of polarization switching in HfO2-based ferroelectrics under the stimuli of sub-coercive voltage pulses using experiments and phase-field modeling; (ii) an inherent rectifying conductance accumulation characteristic in FeFET with a large dynamic range of $G_{\max}/G_{\min} > 100$ in the case of 3.0V, 50ns gate pulses; (iii) transition to more abrupt accumulation characteristics due to single/few domain polarization switching in scaled FeFET (34nm LG); and (iv) successful detection of physiological anomalies from realworld multi-modal sensor data streams.
Physics,Engineering,Materials Science
What problem does this paper attempt to address?