Tailoring of structural and optical properties of GeO x thin films using 100 MeV Si ions

Mahendra Singh Rathore,Arun Vinod,Anand P Pathak,Srinivasa Rao Nelamarri
DOI: https://doi.org/10.1016/j.nimb.2024.165419
2024-06-11
Abstract:In the present work, the effects of 100 MeV Si ions on the structural and optical properties of GeO x thin films have been investigated. Thin films of Germanium oxide (GeO x ) were deposited onto silicon substrates using electron beam evaporation technique. Subsequently, 100 MeV Si 7+ ions were used to irradiate as-deposited films at different fluences ranging from 5 × 10 12 to 2 × 10 13 ions/cm 2 . As-deposited films are amorphous as evident from XRD and Raman results. After irradiation with a fluence of 5 × 10 12 ions/cm 2 the films show partial crystallization. The strong photoluminescence (PL) exhibited from as-deposited and irradiated films is in ultraviolet (UV) and blue region. The blue shift was observed in PL bands after ion beam irradiation. PL band intensity was found to vary with irradiation fluence. The possible mechanism of variation in the PL emission from GeO x thin films with Si ion irradiation has been studied.
physics, nuclear, atomic, molecular & chemical,nuclear science & technology,instruments & instrumentation
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