Formation of Spontaneous Lateral Heterostructures in High Al content AlxGa1−xN Alloys Grown by High-Temperature Plasma-Assisted Molecular Beam Epitaxy

Wendy L. Sarney,Mihee Ji,Asher C. Leff,LeighAnn S. Larkin,Gregory A. Garrett,Anand V. Sampath,Michael Wraback
DOI: https://doi.org/10.1007/s11664-024-10952-x
IF: 2.1
2024-02-23
Journal of Electronic Materials
Abstract:We report on the microstructure of high Al content (0.65 < x < 0.78) AlxGa1−xN planar films grown in the III-rich regime by plasma-assisted molecular beam epitaxy (PA-MBE) at elevated growth temperatures from 800°C to 950°C. Films grown at or above 900°C have lateral periodic contrast oscillations in high-angle annular dark field (HAADF) images from transmission electron microscopy (TEM). The features are perpendicular to the growth direction and arise from spatial variations in the ratio of Al to Ga atoms. These oscillations begin at the AlxGa1−xN/AlN interface and are different from previously observed inhomogeneities that arose from spontaneous ordering and random compositional fluctuations. As prior studies have shown, compositional anomalies can improve certain optical properties, these vertical periodic structures observed here merit further investigation.Graphical Abstract
engineering, electrical & electronic,materials science, multidisciplinary,physics, applied
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