Trap States in p-NiO/n-Ga2O3 heterojunctions on Czochralski β-Ga2O3 crystals
Vladimir I Nikolaev,Alexander Y Polyakov,Vladimir M. Krymov,Danila Sergeevich Saranin,Alexey V. Chernykh,Anton A. Vasilev,Ivan V. Shchemerov,Andrey V. Romanov,Nikolai R Matros,Anastasiia I Kochkova,Pavel Gostishchev,Sergey Chernykh,Sevastian Shapenkov,Pavel Butenko,Eugene B. Yakimov,Stephen J. Pearton
DOI: https://doi.org/10.1149/2162-8777/ad9ace
IF: 2.2
2024-12-07
ECS Journal of Solid State Science and Technology
Abstract:Heterojunctions (HJs) of p-NiO/n-Ga2O3 were prepared by deposition of thin films of p-NiO by ion beam sputtering on bulk nominally undoped (100) oriented n-Ga2O3 samples cleaved from Czochralski-grown (010) oriented crystal. Electrical properties and deep traps spectra were studied and compared with those obtained for similar samples with Ni Schottky diodes. Characteristic features of the NiO/Ga2O3 HJs are the built-in voltage of over 2V compared to 1V in Ni Schottky diodes, a strong frequency dispersion of capacitance due to the presence of high density over 1018 cm-3 of Ec-0.16 eV traps in the thin region adjacent to the NiO/Ga2O3 interface. For heterojunction diodes the strong increase of reverse current occurs at a much higher voltage than for Schottky diodes (120V versus 60V).
materials science, multidisciplinary,physics, applied