Anti-reflection Layer-Sputtered Transparent Polyimide Substrate with Reliable Adhesion Strength to the Copper Layer

Yuan-Nan Tsai,Shih-Chieh Chin,Hsin-Yo Chen,Ming-Syuan Li,Yi-Sheng Chen,Yan-Lin Wang,Ta-I Yang,Mei-Hui Tsai,I-Hsiang Tseng
DOI: https://doi.org/10.1021/acsomega.2c07365
IF: 4.1
2023-02-25
ACS Omega
Abstract:Parameters of DC-reactive magnetron sputtering are optimized to deposit anti-reflection (AR) layers on transparent polyimide (PI) substrates, followed by the deposition of the conductive copper layer, to fabricate practically reliable composite films as advanced flexible circuits. When the deposition thickness is controlled and the gas composition during sputtering is adjusted, the resultant AR layer-coated PI film exhibits low reflectance and reveals improved adhesion strength to the copper...
chemistry, multidisciplinary
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