Ammonothermal Crystal Growth of Functional Nitrides for Semiconductor Devices: Status and Potential

Thomas Wostatek,V. Y. M. Rajesh Chirala,Nathan Stoddard,Ege N. Civas,Siddha Pimputkar,Saskia Schimmel
DOI: https://doi.org/10.3390/ma17133104
IF: 3.4
2024-06-25
Materials
Abstract:The state-of-the-art ammonothermal method for the growth of nitrides is reviewed here, with an emphasis on binary and ternary nitrides beyond GaN. A wide range of relevant aspects are covered, from fundamental autoclave technology, to reactivity and solubility of elements, to synthesized crystalline nitride materials and their properties. Initially, the potential of emerging and novel nitrides is discussed, motivating their synthesis in single crystal form. This is followed by a summary of our current understanding of the reactivity/solubility of species and the state-of-the-art single crystal synthesis for GaN, AlN, AlGaN, BN, InN, and, more generally, ternary and higher order nitrides. Investigation of the synthesized materials is presented, with a focus on point defects (impurities, native defects including hydrogenated vacancies) based on GaN and potential pathways for their mitigation or circumvention for achieving a wide range of controllable functional and structural material properties. Lastly, recent developments in autoclave technology are reviewed, based on GaN, with a focus on advances in development of in situ technologies, including in situ temperature measurements, optical absorption via UV/Vis spectroscopy, imaging of the solution and crystals via optical (visible, X-ray), along with use of X-ray computed tomography and diffraction. While time intensive to develop, these technologies are now capable of offering unprecedented insight into the autoclave and, hence, facilitating the rapid exploration of novel nitride synthesis using the ammonothermal method.
materials science, multidisciplinary,chemistry, physical,physics, applied, condensed matter,metallurgy & metallurgical engineering
What problem does this paper attempt to address?
The main problem that this paper attempts to solve is the challenges and potentials of synthesizing functional nitrides (especially binary and ternary nitrides) by ammonothermal method for use in semiconductor devices. Specifically, the paper focuses on the following aspects: 1. **Exploring emerging and novel nitrides**: The paper discusses the potential applications of these materials, especially the motivation for synthesis in single - crystal form. These nitrides may have functions and performances that surpass those of traditional gallium nitride (GaN). 2. **Understanding reactivity and solubility**: The paper summarizes the current understanding of species reactivity and solubility, as well as the state - of - the - art single - crystal synthesis techniques, especially for GaN, AlN, AlGaN, BN, InN and their ternary and higher - order nitrides. 3. **Defect studies**: The paper explores point defects (such as impurities, intrinsic defects including hydrogenated vacancies) in the synthesized materials and proposes potential ways to reduce or avoid these defects to achieve controllable functional and structural material properties. 4. **Reactor technology and in - situ monitoring**: The paper reviews the recent progress in reactor technology, especially GaN - based in - situ temperature measurement, optical absorption (by UV/Vis spectroscopy), imaging of solutions and crystals (by visible light and X - ray), as well as X - ray computed tomography and diffraction. Although these techniques have been developed for a long time, they can provide unprecedented insights into the interior of the reactor, thus accelerating the exploration of the synthesis of new nitrides. Overall, this paper aims to provide researchers with a comprehensive reference by comprehensively overviewing the current situation and potential of ammonothermal synthesis of nitrides, so as to promote the further development of this field.