GaN, AlN, and InN: A review

S. Strite
DOI: https://doi.org/10.1116/1.585897
1992-07-01
Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures
Abstract:The status of research on both wurtzite and zinc-blende GaN, AlN, and InN and their alloys is reviewed including exciting recent results. Attention is paid to the crystal growth techniques, structural, optical, and electrical properties of GaN, AlN, InN, and their alloys. The various theoretical results for each material are summarized. We also describe the performance of several device structures which have been demonstrated in these materials. Near-term goals and critical areas in need of further research in the III–V nitride material system are identified.
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