Improved Ferroelectricity and Tunneling Electro Resistance in Zr-Rich HfxZr1-xO2 Ferroelectric Tunnel Junction

Jiajie Yu,Zhenhai Li,Pei Liu,Kangli Xu,D. Zhang,Q. Sun,Tianyu Wang,Lin Chen,Jialin Meng,Yongkai Liu,Hao Zhu
DOI: https://doi.org/10.1109/LED.2022.3228589
IF: 4.8157
2023-02-01
IEEE Electron Device Letters
Abstract:HfO2 based ferroelectric materials have great application potential in ferroelectric tunneling junction. Here, the low temperature annealed Zr-Rich HfxZr<inline-formula> <tex-math notation="LaTeX">$1_{-\text {x}}\text{O}_{{2}}$ </tex-math></inline-formula> films based ferroelectric tunnel junction is fabricated on a silicon substrate. It is found that ferroelectricity of the film under operating voltages of 3.3V, 3.5V and 3.7V are excellent, where the largest residual polarization 2Pr is above 50 <inline-formula> <tex-math notation="LaTeX">$\mu \text{C}$ </tex-math></inline-formula>/cm2. The excellent ferroelectricity enables the device to operate at an extremely high speed of 50ns and achieve a high tunneling electro resistance ratio (>50). Based on the first principal calculation, we found that Zr-Rich HfxZr1-xO2 films will show more O-phase and less T-phase. This research paves the pathway to improve the performance of the HfO2 based ferroelectric tunneling junction for future ferroelectric application.
Physics,Engineering,Materials Science
What problem does this paper attempt to address?