Abstract:(TiVCrNbSiTaBY)N high entropy alloy nitride (HEAN) coatings have been deposited onto Si (100) and cemented carbide substrates by radio frequency magnetron sputtering. The deposition is carried out at different bias voltages to study its influence on microstructure, morphology, mechanical properties and tribological behaviour of the coatings. Grazing Incidence X-Ray Diffraction (GIXRD) technique shows that all coatings exhibit single NaCl-type face-centered cubic (FCC) crystal structure, while the preferred orientation of the crystal structure is greatly affected by the bias voltages. High resolution transmission electron microscopy (TEM) reveals that the structure of the coatings is a mixture of amorphous-like phase and FCC crystal structure, which is in agreement with GIXRD data. Cross-sectional Scanning Electron Microscopy (SEM) images exhibit that the columnar structure of the coatings gradually transforms into a featureless dense structure with the increase of bias voltage. SEM and Atomic Force Microscopy reveal that the surface morphology become smoother with increasing bias voltage. The (TiVCrNbSiTaBY)N HEAN coating deposited at a specific bias voltage exhibit a high hardness of 32.2 GPa. The friction coefficient is significantly influenced by the variation of the coatings surface roughness. Tribological tests for coating deposited without and at low bias voltage show that the wear behavior of the coatings is severe abrasive wear and adhesive wear, while at high bias voltage the slight abrasive wear appears. By applying the substrate bias voltage, the (TiVCrNbSiTaBY)N coatings exhibit excellent mechanical and tribological performance, which can be a promising candidate for protective coating in cutting tools or components.

The Effects of Substrate Bias on the Properties of HfC Coatings Deposited by RF Magnetron Sputtering

Effect of Hafnium Addition on the Microstructure and Property Evolutions of ZrCN Coating Prepared via Physical Vapor Deposition

Effect of Substrate Bias on the Structure and Properties of Multi-Element (alcrtatizr)n Coatings

A Study of TaxC1−x Coatings Deposited on Biomedical 316L Stainless Steel by Radio-Frequency Magnetron Sputtering

Effect of bias voltages on microstructure and properties of (TiVCrNbSiTaBY)N high entropy alloy nitride coatings deposited by RF magnetron sputtering

Effects of Bias Voltage on Structure and Properties of Tial-Doped A-C:H Films Prepared by Magnetron Sputtering

Influence of Bias Voltage on Structure and Tribocorrosion Properties of TiSiCN Coating in Artificial Seawater

Effect of bias voltages and interlayer design on microstructure, mechanical properties, and adhesion performance of AlCrSiN coatings deposited using HiPIMS

Effect of Substrate Bias on the Microstructure and Properties of Non-Equimolar (alcrsitizr)n Films with Different Cr/Zr Ratios Deposited Using Reactive Direct Current Magnetron Sputtering

Friction and wear of a-C:H films deposited at different bias in air and NaCl solution

Effect of Substrate Negative Bias on the Microstructural, Optical, Mechanical, and Laser Damage Resistance Properties of HfO2 Thin Films Grown by DC Reactive Magnetron Sputtering

Effect of deposition parameter on properties of AlSn20Cu coating prepared by magnetron sputtering

The Effect of Applied Substrate Negative Bias Voltage on the Structure and Properties of Al-containing A-C:H Thin Films

Effect of substrate bias on structure and properties of (AlTiCrZrNb)N high-entropy alloy nitride coatings through arc ion plating

Effect of substrate bias on the microstructure and mechanical and tribological properties of ZrNbTiMo refractory high entropy alloy film

Effect of bias voltage on the erosion performance of TiAlSiN coatings on TC6 substrate by high power impulse magnetron sputtering

Influence of bias patterns on the tribological properties of highly hydrogenated PVD a-C:H films

Influences of Bias Voltage on Mechanical and Tribological Properties of Ti–Al–C Films Synthesized by Magnetron Sputtering

Effects of Carbon Doping and DC Bias Voltage on Microstructure and Mechanical Properties of AlCrCN Films Synthesized via HiPIMS

Effects Of Hf Content And Immersion Time On Electrochemical Behavior Of Biomedical Ti-22nb-Xhf Alloys In 0.9% Nacl Solution

Bias voltage optimization and cutting performance of AlCrN coatings deposited by a hybrid technology