Effect of deposition parameter on properties of AlSn20Cu coating prepared by magnetron sputtering

Hui SONG,Zhiyong LIU,Weihong TANG,Runtian YANG,Guoping LING
DOI: https://doi.org/10.14024/j.cnki.1004-244x.20171031.003
2017-01-01
Abstract:The AlSn20Cu coating was prepared by unbalanced magnetron sputtering process.The influence of substrate temperature,deposition pressure and substrate bias on the properties of AlSn20Cu coating was analyzed and the optimized preparation technology was further confirmed.The mechanical and tribological properties of AlSn20Cu coating prepared by appropriate parameters were evaluated.The results show that both substrate temperature and deposition pressure play a minor role in determining the adhesive strength of as-prepared AlSn20Cu coating.On the contrary,by adjusting the substrate bias,both hardness and adhesive strength change significantly.Meanwhile,the bearing samples with AlSn20Cu coating prepared with optimized parameters exhibits excellent mechanical properties and tribological properties.
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