Abstract:(TiVCrNbSiTaBY)N high entropy alloy nitride (HEAN) coatings have been deposited onto Si (100) and cemented carbide substrates by radio frequency magnetron sputtering. The deposition is carried out at different bias voltages to study its influence on microstructure, morphology, mechanical properties and tribological behaviour of the coatings. Grazing Incidence X-Ray Diffraction (GIXRD) technique shows that all coatings exhibit single NaCl-type face-centered cubic (FCC) crystal structure, while the preferred orientation of the crystal structure is greatly affected by the bias voltages. High resolution transmission electron microscopy (TEM) reveals that the structure of the coatings is a mixture of amorphous-like phase and FCC crystal structure, which is in agreement with GIXRD data. Cross-sectional Scanning Electron Microscopy (SEM) images exhibit that the columnar structure of the coatings gradually transforms into a featureless dense structure with the increase of bias voltage. SEM and Atomic Force Microscopy reveal that the surface morphology become smoother with increasing bias voltage. The (TiVCrNbSiTaBY)N HEAN coating deposited at a specific bias voltage exhibit a high hardness of 32.2 GPa. The friction coefficient is significantly influenced by the variation of the coatings surface roughness. Tribological tests for coating deposited without and at low bias voltage show that the wear behavior of the coatings is severe abrasive wear and adhesive wear, while at high bias voltage the slight abrasive wear appears. By applying the substrate bias voltage, the (TiVCrNbSiTaBY)N coatings exhibit excellent mechanical and tribological performance, which can be a promising candidate for protective coating in cutting tools or components.

Effects of Bias Voltage on Structure and Properties of Tial-Doped A-C:H Films Prepared by Magnetron Sputtering

Influences of Bias Voltage on Mechanical and Tribological Properties of Ti–Al–C Films Synthesized by Magnetron Sputtering

The Effect of Applied Substrate Negative Bias Voltage on the Structure and Properties of Al-containing A-C:H Thin Films

Influence of Substrate Bias on Properties of TiN Films with X-ray Photoelectron Spectroscopy and Atomic Force Microscopy Studies

Effects of Al Incorporation on the Mechanical and Tribological Properties of Ti-doped A-C:H Films Deposited by Magnetron Sputtering

Effect of bias voltage on the erosion performance of TiAlSiN coatings on TC6 substrate by high power impulse magnetron sputtering

Experimental study and influence mechanismof the properties of α-C:H thin film at different bias voltages

Influence of Bias Voltage on Structure and Tribocorrosion Properties of TiSiCN Coating in Artificial Seawater

Influence of bias patterns on the tribological properties of highly hydrogenated PVD a-C:H films

Effects of substrate temperature and bias voltage on mechanical and tribological properties of cosputtered (TiZrHfTa)N x films

Microstructure, mechanical, and wettability properties of Al-doped diamond-like films deposited using a hybrid deposition technique: Bias voltage effects

Friction and wear of a-C:H films deposited at different bias in air and NaCl solution

Comparative Study of the Tribology of Amorphous Carbon Films Via Magnetron Sputtering Depending on the Different Magnetic Field

Bias-graded Deposition and Tribological Properties of Ti-contained A-C Gradient Composite Film on Ti6Al4V Alloy

Effect of bias voltages on microstructure and properties of (TiVCrNbSiTaBY)N high entropy alloy nitride coatings deposited by RF magnetron sputtering

Effects of bias voltage on the microstructure and properties of AlCrN/AlTiN nanoscale multilayer coatings

Microstructure and Tribological Behavior of TiAlSiN Coatings Deposited by Deep Oscillation Magnetron Sputtering

Effect of bias voltage and nitrogen content on the morphological, structural, mechanical, and corrosion resistance properties of micro-alloyed Ti1−xAl0.8xP0.2XNy films deposited by high power impulse magnetron sputtering

Microstructure and Mechanical Properties of Co-Deposited Ti-Ni Films Prepared by Magnetron Sputtering

Effect of bias voltage on the tribocorrosion performance of TiAlSiN coatings on FH790 steel by arc ion plating

Effects of Ti Content on Microstructure, Mechanical and Tribological Properties of Ti-doped Amorphous Carbon Multilayer Films