Band alignment and charge transfer mechanisms in the prediction of advanced gate dielectrics for carbon nanotube field-effect transistors

Yuanjun Tang,Huiping Zhu,Maguang Zhu,Chengcheng Wang,Song Qiu,Jiantou Gao,Jianhui Bu,Xuewen Zhang,Jun Zhong,Zhenping Wu,Fanyu Liu,Lei Wang,Bo Li
DOI: https://doi.org/10.1016/j.apsusc.2024.160709
IF: 6.7
2024-07-20
Applied Surface Science
Abstract:The search for novel gate dielectrics to mitigate interface state density is a pressing concern in the fabrication of high-performance carbon nanotube field-effect transistors (CNT-FETs). In this study, we investigated the feasibility of employing strontium titanate (STO) with an ultra-high dielectric constant as the gate dielectric in CNT-FETs. By combining X-ray photoelectron spectroscopy measurements with first-principles calculations, we determined the band offsets between CNT and STO, as well as between CNT and conventional gate dielectrics such as HfO 2 and SiO 2 . The valence/conduction band offset (VBO/CBO) at the STO/CNT interface is found to be 1.1 eV/1.5 eV, which is the smallest among all studied interfaces, followed by those at HfO 2 /CNT interface (VBO = 1.3 eV/CBO = 3.4 eV) and SiO 2 /CNT interface (VBO = 3.6 eV/CBO = 4.5 eV). Moreover, charge transfer at the STO/CNT interface exhibits two orders of magnitude lower values compared to that at HfO 2 /CNT interface and is also significantly smaller than that at SiO 2 /CNT interface. This phenomenon can be ascribed to the combined effects of van der Waals forces at the STO/CNT interface and fewer dangling bonds on the STO surface. These findings suggest exceptional compatibility between STO and CNT, making STO highly suitable for high-performance CNT-FETs.
chemistry, physical,physics, applied, condensed matter,materials science, coatings & films
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