Abstract:MgF 2 crystal windows for the weakness part of the optical system have obtained much attention due to the rapid development of photolithography and low-temperature silicon annealing. Investigating the mechanism of laser-induced damage on MgF 2 windows is much more important to push forward its optical applications, which has a few advantages, including lower light transmission, refractive index and higher hardness than CaF 2 crystals. In this work, the damage morphology induced by the 193 nm excimer laser under a threshold energy of 2.8 J/cm 2 shows obvious cracks and craters, which were observed by scanning electron microscopy (SEM). As the number and energy of laser pulses increase, damage to the rear surface increases exponentially. Interestingly, the rear surface of the window material was much more severely damaged than the front surface. Here, the electric field distribution of window material under 193 nm excimer laser irradiation was proposed to illustrate the damage physical mechanism, which is calculated by the 3D finite-difference time-domain (FDTD) method. In conclusion, the electric field intensity of the rear surface is stronger than that of the front surface due to defects in the window materials. Therefore, the improvement of optical crystal quality and optical geometry for the high power laser system could be considered to solve the damage problems for the application of MgF 2 optical windows.

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Damage Behaviors of Silica Microparticles on Fused Silica Optics under 355 Nm High Fluence Laser

Surface Damage Mitigation of Fused Silica with CO2 Laser

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Damage Morphologies of Al2O3 and Fe Particles Attached on the Input Surface of Fused Silica after Irradiation by a 355 Nm Laser.

Mitigation Procedure for Damage on the Surface of Fused Silica Using a CO2 Laser Beam

Characterization of artificial indentation defects in fused silica surface and its damage performance under 355 nm nanosecond laser

Study of Morphological Feature and Mechanism of Potassium Dihydrogen Phosphate Surface Damage under a 351 Nm Nanosecond Laser.

Recent Advances in Laser-Induced Surface Damage of KH2PO4 Crystal

Laser field manipulation and laser damage resistance property of nanotextures on fused silica optics

Micron-size bubble defects in fused silica and its laser induced damage near 355 nm

Selective Delamination upon Femtosecond Laser Ablation of Ceramic Surfaces

Reduced threshold ultraviolet laser ablation of glass substrates with surface particle coverage: A mechanism for systematic surface laser damage

Analysis and Experimental Investigation of Laser Induced Damage of Optics

Effects of CO2 Laser Irradiation on Surface Morphology and Stress Distribution of Fused Silica

Investigation on Hybrid Laser Ablation and Its Application in Fused Silica Damage Mitigation.

Laser-induced damage properties of antireflective porous glasses

Surface Damage Induced by A Combined Millisecond and Nanosecond Laser

Damage characteristics of 193 nm laser irradiated on MgF2 window