Wafer-Scale Freestanding Monocrystalline Chalcogenide Membranes by Strain-Assisted Epitaxy and Spalling

Changhyeon Yoo,Han-Kyun Shin,Sang Sub Han,Seohui Lee,Chung Won Lee,Yu-Jin Song,Tae-Sung Bae,Seung Jo Yoo,Justin Cao,Jung Han Kim,Hyo-Jong Lee,Hee-Suk Chung,Yeonwoong Jung
DOI: https://doi.org/10.1021/acs.nanolett.4c03127
IF: 10.8
2024-10-03
Nano Letters
Abstract:Monocrystalline chalcogenide thin films in freestanding forms are very much needed in advanced electronics such as flexible phase change memories (PCMs). However, they are difficult to manufacture in a scalable manner due to their growth and delamination challenges. Herein, we report a viable strategy for a wafer-scale epitaxial growth of monocrystalline germanium telluride (GeTe) membranes and their deterministic integrations onto flexible substrates. GeTe films are epitaxially grown on Ge...
materials science, multidisciplinary,chemistry, physical,physics, applied, condensed matter,nanoscience & nanotechnology
What problem does this paper attempt to address?