A scalable, resource-efficient process for synthesis of self-supporting germanium nanomembranes

Ghada El Jamal,Gyula Nagy,Daniel Primetzhofer,Tuan T. Tran

DOI: https://doi.org/10.1016/j.mssp.2023.108084

IF: 4.1

2024-01-03

Materials Science in Semiconductor Processing

Abstract:The design of self-supporting membranes is gaining high interest in a broad range of applications, from nanodevices, optoelectronics, sensing, separation, and catalysis. In this report, we demonstrate a synthesis pathway for high quality ultrathin self-supporting germanium membranes using a highly scalable and resource-efficient process. We discuss the process flow, the compatibility between the materials and the processing chemicals, the important details for achieving the pure membranes and potential anomalies related to the etching process. Comprehensive characterization using SEM, EDX, TEM and nuclear microprobe analysis is employed for revealing the physical and structural properties of the synthesized membranes. The outcome of the fabrication process is large-area Ge nanomembranes with extremely flat and clean surfaces.

engineering, electrical & electronic,materials science, multidisciplinary,physics, condensed matter, applied