Halide Vapor Phase Epitaxy of Monolayer Molybdenum Diselenide Single Crystals

Taotao Li,Yang,Liqi Zhou,Wenjie Sun,Weiyi Lin,Lei Liu,Xilu Zou,Si Gao,Yuefeng Nie,Yi Shi,Xinran Wang
DOI: https://doi.org/10.1360/nso/20220055
2023-01-01
National Science Open
Abstract:Single-crystalline transition metal dichalcogenides(TMD) films are of potential application in future electronics and optoelectronics. In this work, a halide vapor phase epitaxy(HVPE) strategy was proposed and demonstrated for the epitaxy of molybdenum diselenide(MoSe 2 ) single crystals, in which metal halide vapors were in-situ produced by the chlorination of molybdenum as sources for the TMD growth. Combined with the epitaxial sapphire substrate, unidirectional domain alignment was successfully achieved and monolayer single-crystal MoSe 2 films have been demonstrated on a 2-inch wafer for the first time. A series of characterizations ranging from centimeter to nanometer scales have been implemented to demonstrate the high quality and uniformity of the MoSe 2 . This work provides a universal strategy for the growth of TMD single-crystal films.
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