Digital inverse patterning solutions for fabrication of high-fidelity microstructures in spatial light modulator (SLM)-based projection lithography

jing chen,Yuan-Yuan Zhao,Jianxin Zhu,xuan-ming duan
DOI: https://doi.org/10.1364/oe.502063
IF: 3.8
2024-02-14
Optics Express
Abstract:Jing-Tao Chen, Yuan-Yuan Zhao, Jian-Xin Zhu, Xuan-Ming Duan Digital mask projection lithography (DMPL) technology is gaining significant attention due to its characteristics of free-mask, ... [Opt. Express 32, 6800-6813 (2024)]
optics
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