Substrate-Independent Maskless Writing of Functionalized Microstructures Using CHic Chemistry and Digital Light Processing

Dan Song,Frederik Kotz-Helmer,Bastian Rapp,Jürgen Rühe
DOI: https://doi.org/10.1021/acsami.2c12000
2022-10-28
Abstract:Maskless photolithography based on digital light processing (DLP) is an attractive technique for the rapid, flexible, and cost-effective fabrication of complex structures with arbitrary surface profiles on the microscale. In this work, we introduce a new material system for structure formation by DLP that is based on photoreactive polymers for the local and light-induced C,H-insertion cross-linking (CHic). This approach allows a simple and versatile generation of microstructures with a broad...
materials science, multidisciplinary,nanoscience & nanotechnology
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