High‐purity Stoichiometric Si3N4 Ceramics through Trimethylsilyl‐substituted Polysilazanes

Tianhao Li,Wei Zhang,Liantai Duan,Ke Chen,Qing Huang,Yinsheng Li,Zhengren Huang,Liu He,Yujie Song
DOI: https://doi.org/10.1111/jace.19008
IF: 4.186
2023-01-28
Journal of the American Ceramic Society
Abstract:Trimethylsilyl‐substituted polysilazanes were designed and successfully synthesized. They were used to fabricate high‐purity stoichiometric Si3N4 ceramics through pyrolysis process. Trimethylsilyl groups improved the stability of polysilazanes and easily escaped during pyrolysis, which effectively reduced oxygen and carbon content in the final polymer‐derived Si3N4. The C content of Si3N4 ceramic was below 0.06 wt%, and the O content was below 1.2 wt%. The Si3N4 ceramics remained amorphous up to 1400°C, yet they were completely transformed into α‐Si3N4 at 1500°C. Synergistic effect from low oxygen and carbon content contributed to highly stable amorphous state of Si3N4 till high temperatures. This amorphous Si3N4 ceramics could be used in cutting‐edge technology where high purity are compulsory. This article is protected by copyright. All rights reserved
materials science, ceramics
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