Role of oxygen on structure and piezoelectric properties of thin films

Shashidhara Acharya,Xian Wang,Qinwen Xu,Mingsheng Zhang,Jianwei Chai,Ping Luo,Poh Chong Lim,Ping Yang,Lei Shen,Chengliang Sun,Kui Yao
DOI: https://doi.org/10.1103/physrevapplied.22.044071
IF: 4.6
2024-10-26
Physical Review Applied
Abstract:thin films have emerged as a technologically important material for several piezoelectric and ferroelectric device applications ranging from acoustic filters and microelectromechanical systems to memories. Such applications require materials to be gro... [Phys. Rev. Applied 22, 044071] Published Fri Oct 25, 2024
physics, applied
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