Theoretical study on design of ZnO piezoelectric thin film sensors

Xiaoming Chen,Zhonghe Jin,Yingyin Zou
1994-01-01
Abstract:A new type of zinc oxide (ZnO) thin film devices can be realized utilizing piezoelectric and surface micromachine technology. The piezoelectric effects of ZnO, the stress distributions of micromachine structure, and the relationship between piezoelectric charge and device size in the ZnO thin film surface micromachine devices were analyzed. The results provide a theoretical basis for the device design.
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