FABRICATION AND PROPERTIES OF A MICROSTRAIN SENSOR BASED ON ZINC OXIDE NETWORK STRUCTURE

Ping Li,Qingliang Liao,Zheng Zhang,Siwei Ma,Yue Zhang
DOI: https://doi.org/10.1142/9789814407601_0024
2012-01-01
Abstract:ZnO materials are promising candidates for microelectronic mechanical systems for their excellent piezoelectric properties. In this study, a flexible strain sensor based on the unique ZnO micrometer-wire network (ZWN) structure was fabricated. The current characteristics of the device were investigated by applying tensile strains. This device also exhibits quick responses to tiny vibrations and microstrains with a high gauge factor up to 350. The effects of piezoelectric, piezoresistance and the ZWN structure were also analyzed in this work. The sensor has a wide range of applications in microrobots, electromechanical coupled electronics and acoustic detection.
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