A Novel Semiconductor Piezoresistive Thin-film Strain Gauge with High-sensitivity
Sijia Ling,Xiaopeng Chen,Lulu Miao,Jiawen Yin,Jiawen Jian,Qinghui Jin
DOI: https://doi.org/10.1109/jsen.2024.3373635
IF: 4.3
2024-01-01
IEEE Sensors Journal
Abstract:Strain sensors are essential to structural health monitoring technology. Commercially available strain gauges currently exhibit limitations such as weak output signal, temperature sensitivity, nonlinearity, instability, and difficulties in mass production. However, the ever-expanding application scenarios of strain gauges have sparked a heightened demand for enhanced sensitivity and testing accuracy in strain detection. In this work, a novel high-sensitive semiconductor strain sensor is developed and manufactured via the MEMS process. The sensor employs dopant silicon as its sensitive material, while its design ingeniously integrates silicon-sensitive grids to amplify the gauge factor and output signal. Through the implementation of a differential output structure, the temperature dependence of the semiconductor resistor can be mitigated. Furthermore, a platinum temperature resistor is integrated to compensate for the impact of temperature variations on the measurement caused by changes in silicon Young’s modulus. The sensor exhibits a nonlinear error of less than 0.5% within the range of 0-196 με. And it possesses a gauge factor of 174, which is approximately 80 times greater than that of existing commercial strain gauges. The proposed sensor exhibits significant performance enhancements and holds promising potential for industrial applications in highly demanding structural health monitoring scenarios.
engineering, electrical & electronic,instruments & instrumentation,physics, applied