Sensor for quantitatively measuring mechanical and electrical properties and microstructure and manufacturing method thereof

Xiaodong Han,Pan Liu,Yonghai Yue,Ze Zhang
2010-01-01
Abstract:The invention relates to a sensor for quantitatively measuring mechanical and electrical properties and microstructure and a manufacturing method thereof. The sensor is characterized by comprising a hanging structure, piezoresistor cantilever beams, supporting beams, a bimetallic strip and the like. When the bimetallic strip generates bending deformation, one of the piezoresistor cantilever beams is pushed, low-dimensional nanomaterials are stretched, and then, the low-dimensional nanomaterials drive the other piezoresistor cantilever beam to generate bending deformation. The magnitude of the stress borne by the low-dimensional nanomaterials is acquired by the change of electrical signals output by the Wheatstone bridge. Meanwhile, the deformation quantity of the low-dimensional nanomaterials is acquired by transverse displacement difference between the two cantilever beams, thereby a stress-strain curve of the low-dimensional nanomaterials can be measured. When the low-dimensional nanomaterials are measured under the energizing state, a voltage-current curve can also be acquired. In addition, a high-resolution imaging system in a transmission electron microscope can be used for recording the relativity of mechanical and electrical properties of the low-dimensional nanomaterials and microstructure change in situ under the atomic lattice resolution.
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