Abstract:The rapid advancement of micro-nano machining technology has led to a decrease in the dimensions of microdevices and microchips, following the principles of Moore's law. In addition to conventional semiconductor materials like silicon, emerging nanoscale materials such as nanowires, nanotubes, and two-dimensional materials are being considered as promising alternative constituent materials. The mechanical properties of these materials have a significant impact on the performance and service life of these microdevices and microchips. However, conventional mechanical testing methods have difficulty in accurately measuring the properties of these materials at the nanoscale due to limitations in displacement control and microforce sensing. Consequently, there is an urgent need to develop a micromechanical device capable of testing nanoscale solid materials. In this study, we propose a concept based on high-resolution image sequences for the design of an integrated micromechanical device capable of synchronously measuring the force and deformation of tested specimens. The device has been fabricated using ultrafast femtosecond laser etching technology, which offers an efficient and cost-effective approach for manufacturing microstructures and is suitable for processing various materials such as metals and nonmetals. The stiffness of the device plays a crucial role in the design of the micromechanical device, and a stiffness-matching criterion is introduced to ensure appropriate design parameters. The fabricated device is employed to conduct in-situ tension experiments on SiC nanowires and multilayer molybdenum disulfide nanosheet within a scanning electronic microscope, enabling accurate measurement of their strength, modulus, and fracture strain.

Force and electrical behavior testing device under Nanometer lines in-situ compressing in transmission electron microscope

Transmission electron microscope nanometer line in situ compressing electromechanical property test device

A testing device for the electric performance of nano line original position downward pull force in transmission electric lens

Single nano line in-situ mechanics all-round property testing device in scanning electron microscope

Mechanical Characterization Device For In Situ Measurement Of Nanomechanical Properties Of Micro/Nanostructures

Apparatus and method for measuring electro-mechanical property and microstructure of nano material in stress condition

Nano material drawing device in scanning electron microscope driven by piezoelectric ceramic piece

Nano-wire in-situ stretching device in scanning electron microscope and method therefor

In situ nanomechanical measurement of Cu nanowires

An integrated push-to-pull micromechanical device: Design, fabrication, and in-situ experiment

Nano lines in-situ stretching device in scanning electron microscope

An New Instrument for Measuring Mechanical Compliance of Micro-Systems

Measurement of mechanical properties of one-dimensional nanostructures with combined multi-probe platform

Microelectromechanical Systems for Nanomechanical Testing: Electrostatic Actuation and Capacitive Sensing for High-Strain-Rate Testing

Contactless Characterization of Electronic Properties of Nanomaterials Using Dielectric Force Microscopy

Probe-Type Microforce Sensor for Mirco/Nano Experimental Mechanics

J212015 Quantitative Evaluation of Conductivity of Metallic Nanowires by Microwave Atomic Force Microscopy

EXPERIMENTAL NANOMECHANICS OF ONE-DIMENSIONAL NANOMATERIALS BY IN SITU MICROSCOPY

In situ electron microscopy four-point electromechanical characterization of freestanding metallic and semiconducting nanowires

Electron microscopy and in situ testing of mechanical deformation of carbon nanotubes.

Note: Nanomechanical characterization of soft materials using a micro-machined nanoforce transducer with an FIB-made pyramidal tip