LiCoO2 thin film cathode sputtered onto 500 °C substrate

Chenglin Wang,Xinyi Dai,Xin Guan,Weishang Jia,Yang Bai,Jingze Li
DOI: https://doi.org/10.1016/j.electacta.2020.136668
IF: 6.6
2020-09-01
Electrochimica Acta
Abstract:<p>LiCoO<sub>2</sub> thin film cathode, which has attracted considerable attention in the past decades due to its promising application in micro-batteries, is commonly produced by magnetron sputtering combined with post-annealing treatment. However, the high temperature treatment hinders its compatibility toward a majority of substrates, while the moderate temperature post-annealing constrains its crystallinity. In this study, LiCoO<sub>2</sub> film cathode is sputtered onto the 500 °C substrate. The <em>in-situ</em> annealed LiCoO<sub>2</sub> thin film cathode is highly crystallized as hexagonal structure without cubic impurities, exhibiting a capacity retention of 75% at 1 C after 200 cycles and excellent rate performance with 55% of initial capacity at 70 C in liquid electrolyte-based cell. All solid-state thin film Li battery exhibits excellent cycle stability. The excellent electrochemical performance is ascribed to highly crystallized LiCoO<sub>2</sub> thin film, which is trigged by high kinetic energy of the sputtered species. On the contrary, the LiCoO<sub>2</sub> film fabricated by post-annealing at 500 °C shows much poorer electrochemical performance due to its lower crystallinity, indicating that the annealing mode is crucial for the sputtering. This work provides a new option to deposite high quality LiCoO<sub>2</sub> thin film via <em>in situ</em> annealing at a relatively low temperature.</p>
electrochemistry
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