Lithium cobalt oxide crystallization on flexible polyimide substrate

J. F. Ribeiro,R. Sousa,E. M. F. Vieira,A. G. Rolo,M. M. Silva,L. Dupont,J. H. Correia,L. M. Goncalves
DOI: https://doi.org/10.1007/s10854-015-3798-1
2015-09-30
Abstract:This work reports the fabrication and characterization of lithium cobalt oxide films (LiCoO2) on flexible Kapton® substrate. LiCoO2 is commonly used as cathode of lithium microbatteries but needs an annealing of 700 °C, which is not compatible with most flexible substrates. LiCoO2 films were deposited by reactive RF sputtering followed by an annealing process at 400 °C for 1 h in vacuum and air atmospheres both in silicon and Kapton® substrates. Raman spectroscopy, X-ray diffraction patterns and scanning electron microscopy images were used to evaluate samples crystallinity and morphology. Films fabricated in Kapton® and silicon substrates were compared.
engineering, electrical & electronic,materials science, multidisciplinary,physics, condensed matter, applied
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