High-Speed and One-Step Deposition of a LiCoO 2 Thin-Film Electrode by a High-Repetition 1064 nm Nd:YAG Fiber Laser
Kaidi Yuan,Miao Xie,Wujie Dong,Pei Zhao,Jun Pan,Zhanqiang Liu,Xiaoming Xie,Wei Peng,Fuqiang Huang
DOI: https://doi.org/10.1021/acsaem.2c02826
IF: 6.4
2022-11-22
ACS Applied Energy Materials
Abstract:All-inorganic solid-state batteries (AISSBs) attract great research interest due to the benefits in safety and energy density. The thin-film battery, based on vacuum technology, is a type of AISSB that could reduce the thickness of a solid-state electrolyte to a few microns and provide void-free electrode–electrolyte contact. The key step of fabricating the thin-film battery is the deposition technique. Conventional pulsed laser deposition (PLD), which uses an excimer laser as energy source, is considered a promising technique but suffers from drawbacks like high cost, low speed, small scale, and consumption of rare/toxic working gases. Here, we introduce a high-repetition 1064 nm Nd:YAG fiber laser to replace the excimer laser for PLD application. This type of laser is solid-state and small in size, and its kHz to MHz repetition rate enables high deposition speed. This work focuses on the deposition of the LiCoO2 electrode, as a demonstration of this novel PLD. The growth rate reached 1 nm/s in an area of ∼15 cm2. Controlling parameters such as vacuum level and substrate temperature (limited to 550 °C in this work) were explored. It was found that high-quality LiCoO2 thin film prefers rough vacuum and high temperature. The electrochemical performances of the electrodes were evaluated in half-cells. The specific capacity is dependent on film thickness and charge/discharge rate: a value of 90 mAh/g was achieved for a 1.31 μm sample at 0.2 C, while 118 mAh/g was reached for a 0.27 μm sample at 0.5 C. The long-term cycling performance of a 0.43 μm sample showed 80% capacity retention after 565 charge–discharge cycles at 0.5 C. These preliminary results demonstrate that the Nd:YAG fiber-laser-based PLD can be a promising method for producing thin-film electrodes in large scale.
materials science, multidisciplinary,chemistry, physical,energy & fuels