Clean assembly of van der Waals heterostructures using silicon nitride membranes

Wendong Wang,Nicholas Clark,Matthew Hamer,Amy Carl,Endre Tovari,Sam Sullivan-Allsop,Evan Tillotson,Yunze Gao,Hugo de Latour,Francisco Selles,James Howarth,Eli G. Castanon,Mingwei Zhou,Haoyu Bai,Xiao Li,Astrid Weston,Kenji Watanabe,Takashi Taniguchi,Cecilia Mattevi,Thomas H. Bointon,Paul V. Wiper,Andrew J. Strudwick,Leonid A. Ponomarenko,Andrey V. Kretinin,Sarah J. Haigh,Alex Summerfield,Roman Gorbachev
DOI: https://doi.org/10.1038/s41928-023-01075-y
IF: 33.255
2023-12-06
Nature Electronics
Abstract:Nature Electronics, Published online: 05 December 2023; doi:10.1038/s41928-023-01075-y Membranes made of metal-coated silicon nitride can be used to assemble van der Waals heterostructures without a polymer support layer, thus improving cleanliness and allowing assembly at more extreme temperature and vacuum conditions.
engineering, electrical & electronic
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