Abstract:Two-dimensional (2D) van der Waals (vdW) heterostructures have attracted considerable attention in recent years1-5. The most widely used method of fabrication is to stack mechanically exfoliated micrometre-sized flakes6-18, but this process is not scalable for practical applications. Despite thousands of 2D materials being created, using various stacking combinations1-3,19-21, hardly any large 2D superconductors can be stacked intact into vdW heterostructures, greatly restricting the applications for such devices. Here we report a high-to-low temperature strategy for controllably growing stacks of multiple-layered vdW superconductor heterostructure (vdWSH) films at a wafer scale. The number of layers of 2D superconductors in the vdWSHs can be precisely controlled, and we have successfully grown 27 double-block, 15 triple-block, 5 four-block and 3 five-block vdWSH films (where one block represents one 2D material). Morphological, spectroscopic and atomic-scale structural analyses reveal the presence of parallel, clean and atomically sharp vdW interfaces on a large scale, with very little contamination between neighbouring layers. The intact vdW interfaces allow us to achieve proximity-induced superconductivity and superconducting Josephson junctions on a centimetre scale. Our process for making multiple-layered vdWSHs can easily be generalized to other situations involving 2D materials, potentially accelerating the design of next-generation functional devices and applications22-24. Stacks of van der Waals superconductor heterostructures comprising many layers and several blocks of two-dimensional materials have been grown in a highly controllable manner at a wafer scale using a high-to-low temperature strategy.

Optimization of Mechanically Assembled Van Der Waals Heterostructure Based On Solution Immersion and Hot Plate Heating

A van der Waals pn heterojunction with organic/inorganic semiconductors

Tunable Two-Dimensional Interfacial Coupling in Molecular Heterostructures

Transfer assembly for two-dimensional van der Waals heterostructures

Reliable Postprocessing Improvement of van der Waals Heterostructures

The hot pick-up technique for batch assembly of van der Waals heterostructures

Constructing van der Waals heterostructures by dry-transfer assembly for novel optoelectronic device

Ultra-clean assembly of van der Waals heterostructures

Heated Assembly and Transfer of Van der Waals Heterostructures with Common Nail Polish

Suspended dry pick-up and flip-over assembly for van der Waals heterostructures with ultra-clean surfaces

Controlled Preparation of High Quality Bubble-Free and Uniform Conducting Interfaces of Vertical Van Der Waals Heterostructures of Arrays.

Hybrid van der Waals heterojunction based on two-dimensional materials

Effects of Stacking Method and Strain on the Electronic Properties of the Few-Layer Group-Iva Monochalcogenide Heterojunctions

Tuning and exploiting interlayer coupling in two-dimensional van der Waals heterostructures

Strategy for transferring van der Waals materials and heterostructures

Stack Growth of Wafer-Scale Van Der Waals Superconductor Heterostructures

Imaging of Interlayer Coupling in van der Waals Heterostructures Using a Bright-Field Optical Microscope

Assembly of van der Waals heterostructures: exfoliation, searching, and stacking of 2D materials

Realization of Vertical and Lateral Van Der Waals Heterojunctions Using Two-Dimensional Layered Organic Semiconductors

Van der Waals Heterostructures by Design: From 1D and 2D to 3D

Mixed-dimensional van der Waals heterostructures: Synthesis, properties, and applications