Abstract:Two-dimensional (2D) van der Waals (vdW) heterostructures have attracted considerable attention in recent years1-5. The most widely used method of fabrication is to stack mechanically exfoliated micrometre-sized flakes6-18, but this process is not scalable for practical applications. Despite thousands of 2D materials being created, using various stacking combinations1-3,19-21, hardly any large 2D superconductors can be stacked intact into vdW heterostructures, greatly restricting the applications for such devices. Here we report a high-to-low temperature strategy for controllably growing stacks of multiple-layered vdW superconductor heterostructure (vdWSH) films at a wafer scale. The number of layers of 2D superconductors in the vdWSHs can be precisely controlled, and we have successfully grown 27 double-block, 15 triple-block, 5 four-block and 3 five-block vdWSH films (where one block represents one 2D material). Morphological, spectroscopic and atomic-scale structural analyses reveal the presence of parallel, clean and atomically sharp vdW interfaces on a large scale, with very little contamination between neighbouring layers. The intact vdW interfaces allow us to achieve proximity-induced superconductivity and superconducting Josephson junctions on a centimetre scale. Our process for making multiple-layered vdWSHs can easily be generalized to other situations involving 2D materials, potentially accelerating the design of next-generation functional devices and applications22-24. Stacks of van der Waals superconductor heterostructures comprising many layers and several blocks of two-dimensional materials have been grown in a highly controllable manner at a wafer scale using a high-to-low temperature strategy.

Assembly of van der Waals heterostructures: exfoliation, searching, and stacking of 2D materials

Transfer assembly for two-dimensional van der Waals heterostructures

Two‐Dimensional Layered Heterostructures Synthesized from Core–Shell Nanowires

Ultra-clean assembly of van der Waals heterostructures

Constructing van der Waals heterostructures by dry-transfer assembly for novel optoelectronic device

Strategy for transferring van der Waals materials and heterostructures

Van der Waals Heterostructures by Design: From 1D and 2D to 3D

Steering on Degrees of Freedom of 2D Van Der Waals Heterostructures

Simultaneous Assembly of van der Waals Heterostructures into Multiple Nanodevices

Tuning and exploiting interlayer coupling in two-dimensional van der Waals heterostructures

Towards Scalable Fabrications and Applications of 2D Layered Material-based Vertical and Lateral Heterostructures

Stack Growth of Wafer-Scale Van Der Waals Superconductor Heterostructures

Layer-by-layer assembly of two-dimensional materials into wafer-scale heterostructures

Van der Waals heterostructures

Controllable Preparation of 2D Vertical van der Waals Heterostructures and Superlattices for Functional Applications

Pick-up and assembling of chemically sensitive van der Waals heterostructures using dry cryogenic exfoliation

Superlattices based on van der Waals 2D materials

Recent progress in 2D van der Waals heterostructures: fabrication, properties, and applications

Van der Waals heterostructures with one-dimensional atomic crystals

The fabrication and physical properties of two-dimensional van der Waals heterostructures