Abstract:Cross-scale self-similar hierarchical micro–nano structures in living systems often provide unique features on surfaces and serve as inspiration sources for artificial materials or devices. For instance, a highly self-similar structure often has a higher fractal dimension and, consequently, a larger active surface area; hence, it would have a super surface performance compared to its peer. However, artificial self-similar surfaces with hierarchical micro–nano structures and their application development have not yet received enough attention. Here, by introducing solvent-assisted UV-lasering, we establish an elegant approach to fabricate self-similar hierarchical micro–nano structures on silicon. The self-similar structure exhibits a super hydrophilicity, a high light absorbance (>90%) in an ultra-broad spectrum (200–2500 nm), and an extraordinarily high efficiency in heat transfer. Through further combinations with other techniques, such surfaces can be used for capillary assembling soft electronics, surface self-cleaning, and so on. Furthermore, such an approach can be transferred to other materials with minor modifications. For instance, by doping carbon in polymer matrix, a silicone surface with hierarchical micro–nano structures can be obtained. By selectively patterning such hierarchical structures, we obtained an ultra-high sensitivity bending sensor. We believe that such a fabrication technique of self-similar hierarchical micro–nano structures may encourage researchers to deeply explore the unique features of functional surfaces with such structures and to further discover their potentials in various applications in diverse directions.

Hierarchically Ordered Silicon Metastructures from Improved Self-Assembly-Based Nanosphere Lithography

Multiple-Patterning Nanosphere Lithography for Fabricating Periodic Three-Dimensional Hierarchical Nanostructures.

Periodic Silicon Nanocones Arrays with Controllable Dimensions Prepared by Two-Step Etching Using Nanosphere Lithography and NH4OH/H2O2 Solution

Physiochemical Coupled Dynamic Nanosphere Lithography Enabling Multiple Metastructures from Single Mask

Size and Morphology Control of Highly-Ordered Nano-Silicon Pillar Fabricated by Direct Nanosphere Lithography

Highly Tunable Complementary Micro/Submicro-Nanopatterned Surfaces Combining Block Copolymer Self-Assembly and Colloidal Lithography.

Fabrication of Silicon Hierarchical Nanopillar Arrays Based on Nanosphere Lithography

Facile Fabrication of Self-Similar Hierarchical Micro-Nano Structures for Multifunctional Surfaces via Solvent-Assisted UV-Lasering

Controllable fabrication of periodic arrays of high-aspect-ratio micro-nano hierarchical structures and their superhydrophobicity

Preparation of High-Quality Colloidal Mask for Nanosphere Lithography by a Combination of Air/Water Interface Self-Assembly and Solvent Vapor Annealing

Superplastic Nanomolding of Highly Ordered Metallic Sub-Micrometer Pillars Arrays for Surface Enhanced Raman Scattering

Precise tailoring of multiple nanostructures based on atomic layer assembly via versatile soft-templates

Direct Fabrication of Complex 3D Hierarchical Nanostructures by Reactive Ion Etching of Hollow Sphere Colloidal Crystals.

The fabrication of long-range ordered nanocrescent structures based on colloidal lithography and parallel imprinting.

A route to engineered high aspect-ratio silicon nanostructures through regenerative secondary mask lithography

Fabrication and optical properties of silicon nanopillar arrays with controllable surface structures

Monolayer Colloidal Mask with Tunable Interstice Size for Nanosphere Lithography

Fabrication of large-scale periodic silicon nanopillar arrays for 2D nanomold using modified nanosphere lithography☆

Ordered silicon nanorod arrays with controllable geometry and robust hydrophobicity

Fabricating 3D Si nanostructure via a novel Ga+ implantation enabled maskless dry etching process

Bio-Inspired Fabrication of Complex Hierarchical Structure in Silicon