Abstract:This research reports the development of 3D carbon nanostructures that can provide unique capabilities for manufacturing carbon nanotube (CNT) electronic components, electrochemical probes, biosensors, and tissue scaffolds. The shaped CNT arrays were grown on patterned catalytic substrate by chemical vapor deposition (CVD) method. The new fabrication process for catalyst patterning based on combination of nanoimprint lithography (NIL), magnetron sputtering, and reactive etching techniques was studied. The optimal process parameters for each technique were evaluated. The catalyst was made by deposition of Fe and Co nanoparticles over an alumina support layer on a Si/SiO2 substrate. The metal particles were deposited using direct current (DC) magnetron sputtering technique, with a particle ranging from 6 nm to 12 nm and density from 70 to 1000 particles/micron. The Alumina layer was deposited by radio frequency (RF) and reactive pulsed DC sputtering, and the effect of sputtering parameters on surface roughness was studied. The pattern was developed by thermal NIL using Si master-molds with PMMA and NRX1025 polymers as thermal resists. Catalyst patterns of lines, dots, and holes ranging from 70 nm to 500 nm were produced and characterized by scanning electron microscopy (SEM) and atomic force microscopy (AFM). Vertically aligned CNTs were successfully grown on patterned catalyst and their quality was evaluated by SEM and micro-Raman. The results confirm that the new fabrication process has the ability to control the size and shape of CNT arrays with superior quality.

Controllable patterning and CVD growth of isolated carbon nanotubes with direct parallel writing of catalyst using Dip Pen Nanolithography

Confined Growth of Carbon Nanotubes in Nanocutting Channel on Highly Oriented Pyrolytic Graphite

Preferential Growth of Carbon Nanotubes/Nanofibers Using Lithographically Patterned Catalysts

Uniform Patterned Growth of Carbon Nanotubes Without Surface Carbon

Nanoimprint Lithography for Next-Generation Carbon Nanotube-Based Devices

Controlled Growth, Patterning and Placement of Carbon Nanotube Thin Films

Wafer Scale Synthesis of Dense Aligned Arrays of Single-Walled Carbon Nanotubes

Selective Growth of Carbon Nanotube on Silicon Substrates

Patterning and growth of carbon nanotubes on a highly structured 3D substrate surface

Direct Preparation and Patterning of Iron Oxide Nanoparticles Via Microcontact Printing on Silicon Wafers for the Growth of Single-Walled Carbon Nanotubes

Patterned carbon nanotubes fabricated by the combination of microcontact printing and diblock copolymer micelles.

Direction-Selective and Length-Tunable In-Plane Growth of Carbon Nanotubes

Uniform Patterned Synthesis of Vertically-Aligned Carbon Nanotubes on Low-Stress Micromechanical Structures

Controllable Synthesis of CNTs Using Pd Catalyst

Controlled Growth Of Arrays Of Straight And Branched Carbon Nanotubes.

Fast and Controlled Integration of Carbon Nanotubes into Microstructures

Fabrication of Patterned Carbon Nanotubes with Adjustable Arrays Through Controlled Mesoscopic Dewetting

Patterning Catalyst Via Inkjet Printing to Grow Single-Walled Carbon Nanotubes

Carbon nanotube growth for through silicon via application

Scalable and number-controlled synthesis of carbon nanotubes by nanostencil lithography

High-rate Low-Temperature Growth of Vertically Aligned Carbon Nanotubes