Super retina TFT based full color microLED display via laser mass transfer
Xu Yang,Jinchai Li,Xuhui Peng,Chunfeng Zhao,Chao Chen,Xiaowei Zhang,Jinliang Lin,Donghua Li,Yuefen Chen,Zhaoxia Bi,Feng Qin,Cheng Li,Kai Huang,Junyong Kang,Rong Zhang
DOI: https://doi.org/10.1007/s11432-024-4111-9
2024-10-22
Science China Information Sciences
Abstract:MicroLED display is considered one of the most promising technologies for next-generation displays. However, the high manufacturing cost has been a major obstacle to its accessibility to the general consumer market, and mass transfer, an essential process to achieve cost-effective manufacturing, has not yet reached commercial maturity. Critical issues, such as microLED chips, transfer equipments, and process materials, need to be addressed for the mass transfer technologies. In this work, we present a 1.63-inch full color microLED display module fabricated with laser mass transfer, which has a pixel density of 403 pixels per inch (PPI), the highest resolution ever achieved in the industry using mass transfer technologies. The laser mass transfer is realized with three process nodes: laser lift-off, laser induced forward transfer, and carrier bonding. Each node has been well explored to improve yields. Insights into the present progress and the future development of the laser mass transfer will be shared in this work.
computer science, information systems,engineering, electrical & electronic