Ultra-small Size Micro-LEDs with Enhanced Efficiency for Near-Eye Display

Feifan Xu,Tao,Dongqi Zhang,Yimeng Sang,Junchi Yu,Honghui He,Jinpeng Huang,Ting Zhi,Zhe Zhuang,Zili Xie,Rong Zhang,Bin Liu
DOI: https://doi.org/10.1109/led.2024.3401132
IF: 4.8157
2024-01-01
IEEE Electron Device Letters
Abstract:Micro Light-emitting diodes (Micro-LEDs) array for near-eye display with pixel dimensions of 1.3x1.5 mu m(2) were fabricated, corresponding to a resolution of 10040 pixels per inch (PPI). Optimized N2O plasma treatment process was deployed to minimize the sidewall non-radiative recombination and increase radiative efficiency of Micro-LEDs. The experimental results demonstrated a significant improvement in external quantum efficiency (EQE) of blue and green Micro-LEDs, with peak EQE of 22.3% and 19.3%, respectively. High brightness and optical power density was acquired exceeding 5x10(7) nits and 7x10(4) mW/cm(2). And excellent wavelength and efficiency stability were demonstrated with respect to the temperature. This results illustrate an immense potential of Micro-LEDs for high resolution near-eye display applications.
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