Wafer-scale transistor arrays fabricated using slot-die printing of molybdenum disulfide and sodium-embedded alumina

Yonghyun Albert Kwon,Jihyun Kim,Sae Byeok Jo,Dong Gue Roe,Dongjoon Rhee,Younguk Song,Byoungwoo Kang,Dohun Kim,Jeongmin Kim,Dae Woo Kim,Moon Sung Kang,Joohoon Kang,Jeong Ho Cho
DOI: https://doi.org/10.1038/s41928-023-00971-7
IF: 33.255
2023-06-10
Nature Electronics
Abstract:Nature Electronics, Published online: 08 June 2023; doi:10.1038/s41928-023-00971-7 Arrays of thin-film transistors can be fabricated on the 5-inch wafer scale using solution-based processing of molybdenum disulfide and sodium-embedded alumina inks for the semiconductor and gate dielectric, respectively, yielding devices with room-temperature mobilities of up to 80 cm2 V−1 s−1.
engineering, electrical & electronic
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