AFM Analysis on Surface Roughness of Single Crystal Silicon Machined with Carbon Nanotubes Reinforced Composite Micro Grinding Wheel

S. Oliver Nesa Raj,S. Prabhu
DOI: https://doi.org/10.1007/s12633-022-01920-3
IF: 3.4
2022-05-07
Silicon
Abstract:The examination on grinding single crystal silicon slice using newly developed CNT (carbon nanotubes) reinforced micro grinding wheel were performed. A specially designed four-legged vacuum chuck was fabricated to hold the workpiece and ground the sliced silicon surface using with and without CNT reinforced micro grinding wheel in which the diameter is 50.65 mm. In order to understand the stability of the fixture, a vibrational analysis was performed, which was supported by a vibrational sensor. The diameters of a single crystal silicon slice are 25 mm. The vacuum chuck has mounted silicon slice was grinding using CBN (Cubic boron nitride) and CNT infused CBN micro-wheel in dry condition. After grinding, the surface quality was analyzed, it was found that the CNT composite micro grinding wheel can be used to precisely ground brittle materials like single crystal silicon. It was noticed that the slice ground by CNT infused micro wheel had a smooth surface with minor waviness, which is based on wheel speed, feed rate and depth of cut and the stability of the fixture. The result shows that the surface roughness of the silicon slice grounded with CBN (Cubic boron nitride) is around Ra 1.1464–1.8631 μm and CNT infused CBN micro-wheel is about Ra 0.6154 μm when other settings are not changed. The influence of CNT in the silicon samples was characterized through surface roughness measurements, scanning electron microscopy (SEM) and Atomic Force Microscopy (AFM) studies. It was found that the stresses developed in the material and the assembly was within the permissible limits, and the surface quality of grinding with cnt infused CBN micro-grinding wheel is better than without CNT.
materials science, multidisciplinary,chemistry, physical
What problem does this paper attempt to address?