Photoresponse of O2 plasma treated WS2 monolayers synthesized by chemical vapor deposition

André do Nascimento Barbosa,Neileth Johanna Stand Figueroa,Cesar Augusto Diaz Mendoza,Fernando Lázaro Freire
DOI: https://doi.org/10.1116/6.0002202
2023-03-02
Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films
Abstract:WS 2 monolayers synthesized by chemical vapor deposition underwent low-power O 2 plasma treatment, and the effect of this treatment was studied in this work. The results show that the WS 2 photoresponse is quenched due to the treatment and subsequently vanishes for more extended periods of plasma exposure. Raman spectra of the treated WS 2 monolayers show that the position of the LA(M) mode is blueshifted and has a larger FWHM when compared with pristine samples. Since the LA(M) phonon can be used as a figure of merit to infer indirectly a density of defects in the lattice, these results show an increase in defects upon treatment times. At the same time, the main E 2g and A 1g peak positions remain nearly unchanged for short plasma exposures, indicating that there is an intrinsic defect-related process rather than a strain-related change. X-ray photoelectron spectroscopy results reveal the presence of O impurities incorporated into lattice passivating sulfur vacancies, while atomic force microscopy confirms that the sample creates cracks at the micrometer scale. Our results indicate that the pure oxygen plasma treatment significantly reduces the photoresponse of WS 2 monolayers by increasing the density of defects.
physics, applied,materials science, coatings & films
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