Influence of Mg doping level at the initial growth stage on the gate reliability of p-GaN gate HEMTs

Yijin Guo,Haodong Wang,Xin Chen,Hongwei Gao,Fangqing Li,Yaozong Zhong,Yu Zhou,Qian Li,Wenbo Li,Qian Sun,Hui Yang
DOI: https://doi.org/10.1088/1361-6463/ac761b
2022-06-07
Abstract:This letter has studied the gate reliability of p-GaN HEMTs influenced by the Mg doping level at the initial growth stage of p-GaN layer. Normally-off HEMTs with p-GaN gate fabricated with relatively low and high Mg doping concentration have been analyzed and compared based on their performances at various status of as-fabricated, forward step-stressed, reverse step-stressed and long-term reverse stressed. It reveals that Mg over-doping has a detrimental effect on the p-GaN gate reliability through degrading the PIN diode formed by p-GaN/AlGaN/GaN structure. Severe drain current reduction, threshold voltage instability and gate leakage increase have been observed after being negatively stressed due to the high-density defects acting as apparent acceptor-like traps induced by Mg over-doping. The detailed studies on the p-GaN gate performance with various Mg concentrations gives a greater depth of understanding to realize high gate reliability of p-GaN gate HEMTs.
physics, applied
What problem does this paper attempt to address?