Analysis and Achievement of the Leak Detection of High Vacuum System on Magnetron Sputtering Equipment

Jin Chun Feng,Song He Huang,Min Su
DOI: https://doi.org/10.4028/www.scientific.net/amm.142.71
2011-11-01
Applied Mechanics and Materials
Abstract:Since the reform and opening, China's economy has achieved remarkable results, for various industries have developed rapidly. After 2 decades, 1950s and 1990s, China's vacuum industry also has get dramatic development and vacuum equipments have been widely applied in the electronics industry, especially in the semiconductor and integrated circuit production. This paper described the detection process and method of high vacuum magnetron sputtering equipment, utilized the one-by-one elimination to determine the key emphasis in work and succeeded in finding the cause of the substantial decline in the vacuum degree, then elaborated the results and effectiveness of detection, and finally made a conclusion. This paper has a referential significance on the maintenance of the same kind equipment.
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