The error analysis and experimental research of micro-angle measurement system based on F-P etalon

Shinan Zhou,Xiaoyan Shen,Chenguang Wu,Dongsheng Li
DOI: https://doi.org/10.1117/12.2611746
2021-11-19
Abstract:The modern industry has higher precision demand for micro-angle measurement, the measurement methods and measurement techniques are constantly progressing. A micro-angle measurement method based on the interference imaging principle of F-P etalon was proposed, and the micro-angle measurement can be achieved in conjunction with an effective data processing technique. This paper performs error analysis and experimental study on the measurement system. Theory analyzes the effect of temperature change, nonlinearity of focal length calculation model, focusing error, and F-P etalon interval on micro-angle measurement results, and proposes possible solutions. A micro-angle measurement experiment with different F-P etalon intervals (2 mm, 3 mm, 5 mm) were performed using existing experimental devices. The experimental results show that the uncertainty of the micro-angle measurement results at interval d = 3 mm is optimal; under the current test conditions, the angle measurement uncertainty in the 300" measurement range is not greater than 0.08".
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