Novel method to improve stroke of electrostatically actuated MEMS micromirror

Niwit Aryal,Arezoo Emadi

DOI: https://doi.org/10.1117/12.2538357

2019-08-30

Abstract:In this paper, an electrostatically actuated MEMS micromirror with enhanced stroke is presented. Unlike traditional MEMS micromirror, the proposed micromirror achieves a large out-of-plane stroke through employing a larger air gap for the micromirror surface to move as well as eliminating the pull-in instability. This novel micromirror has a central reflective micromirror surface of 400 m by 400 m, an L-shaped arm that holds the micromirror to the anchor on all side and 3 fixed bottom electrodes beneath each L-shaped arms. The lateral electrostatic forces on the upper L-shaped arm are equal in magnitude but opposite in direction and they counteract to neutralize out each other. The electrostatic force produced on the top L-shaped arm is larger than on the bottom. Therefore, the net electrostatic force points in the upward direction. As a result, the upper plate of the micromirror moves upwards. COMSOL Multiphysics is used to simulate and design the device in order to optimize the stroke of the micromirror for a lower input voltage. The mirror is fabricated using PolyMUMPs fabrication technique where an air cavity of 2.75 m was achieved by combining the two available sacrificial layers. In this proposed design, an out-of-plane stroke of 2.43 m is achieved at a 110 V DC bias voltage.