Study on the Anodic Bonding Mechanism of Polymer Electrolyte and Aluminum Based on MEMS Sensor Package

Xu Yin,Cui-Rong Liu,Yuan-Yuan Meng,Li-Fo Zhang
DOI: https://doi.org/10.1007/s10904-020-01461-5
IF: 3.518
2020-02-06
Journal of Inorganic and Organometallic Polymers and Materials
Abstract:In this paper, Polyethylene oxide (PEO) is used as the main material to prepare PEO–LiClO<sub>4</sub>, a polymer electrolyte packaging material. The complexation mechanism of PEO–LiClO<sub>4</sub> was studied by fourier transform infrared (FT-IR) spectra. Finally, the bonding of PEO–LiClO<sub>4</sub> with Al was completed by anodic bonding method. Secondly, the bonding mechanism of PEO–LiClO<sub>4</sub> and Al was revealed by FT-IR and energy dispersive spectrum analysis. The results show that in a certain range, the more lithium salt content, the more Li<sup>+</sup> number of ether oxygen coordination in the molecular chain of LiClO<sub>4</sub> and PEO, the higher the degree of complexation; under the action of strong electrostatic field, the ion-coordination exchange of PEO–LiClO<sub>4</sub> and Al at the bonding interface by ion diffusion is the direct reason for the two to achieve bonding.
polymer science
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