Current fluctuations of a monocrystalline (100) silicon field emitter

H H Busta,B J Zimmerman,J E Pogemiller
DOI: https://doi.org/10.1088/0960-1317/4/2/003
1994-06-01
Journal of Micromechanics and Microengineering
Abstract:Current fluctuations of a gated, n-type, (100) silicon field emitter were recorded from initial emission, through the forming process, and then cycled between low ( approximately 0.4 mu A) and high ( approximately 10 mu A) currents. After the first excursion from high to low current, the signature of the fluctuations changes from being very noisy to near stable, indicating electron-induced desorption of the surface impurities during the high-current operation. The near-stable condition becomes noisy again over a time period of 100 min at a pressure of 3*10-9 Torr. This indicates re-adsorption of impurities such as oxygen, hydrogen, carbon, and carbon monoxide from the background gas and/or the formation of a new native oxide layer.
engineering, electrical & electronic,nanoscience & nanotechnology,instruments & instrumentation,physics, applied
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