Sputtering of Spindt-type Field Emission Tip Induced by Electron Stimulated Desorption of Gate Contaminations

Tao Zheng,Bo Zhang,Bruce Gnade
DOI: https://doi.org/10.1109/ivnc.2017.8051536
2017-01-01
Abstract:The sputtering of Mo Spindt emitter due to the gate absorbent are observed when nA level emission current is collected by the gate for a duration of tens of seconds under a vacuum of 1×10 -7 Torr.
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