Abstract:Nowadays, electrical insulation issue has attracted increasing concerns as the physical dimension of electrical devices and equipment shrinks to micrometer and even nanometer. Since almost all the nanostructures and nanodevices are driven by electrical bias, it is very vital to make sure a good robustness while operating under the high electric field. Hence, to understand the breakdown behaviors across a vacuum nanogap is of great interest for the insulation reliability evaluation of naonstructures and nanodevices. In the present work, cathode materials with various thermal properties were employed and the breakdown measurement was carried out across a 100-nm vacuum gap by utilizing the in-situ nanoscale discharge measurement system based on the scanning electron microscope and piezoelectric nano-manipulator. Results show that the ${I-V}$ curves for both Mo and W cathodes demonstrate the similar trend, which can be generally regarded to be three stages: leakage dark current stage (several pA), electron emission stage $( \sim 2.0 nA)$ and breakdown development stage (several mA). Moreover, W cathode with a higher melting point shows a larger average breakdown threshold $( \sim 241.2\mathrm {V})$ than Mo cathode $( \sim 199.4\mathrm {V})$, which indicates the metal atomic vapor evaporated from the cathode plays a key role on the electron avalanche and breakdown. As a consequence, the hypothesis for cathode process is put forward, regarding that the field emission dominates the initial stage and then thermionic emission takes over until the gap is filled with massive ions and electrons and the breakdown occurs. This would be of great benefit for better understanding of vacuum breakdown behavior at nanoscale.

Thermal instability of molybdenum and silicon tips

Theoretical Study of Thermal Instability of Mo Tips with and Without Diamond Coatings

A Theoretical Study of Thermal Instability of Tips with and Without Diamond Coatings

The Thermal Stability and Lubricity of Zinc Thiomolybdenate at Temperatures Up to 500°C

An Initiation Mechanism of Thermal Instability of A Metal-Diamond-Vacuum Field Emission Regime

Vacuum Breakdown Of Carbon-Nanotube Field Emitters On A Silicon Tip (Vol 83, Pg 2671, 2003)

Structural Evolution and Thermal Runaway of Refractory W and Mo Nanotips in the Vacuum under High Electric Field from PIC-ED-MD Simulations

Thermal Instability of A Conduction Channel in Chemical Vapor Deposition Diamond Films

Molecular Dynamics Simulations of Thermal Evaporation and Critical Electric Field of Copper Nanotips

Stability Consideration of Metal–diamond–vacuum Micro-Emission Regimes

Nanotip Shape Evolution Under High Electric Fields Based on Molecular Dynamics

Thermal Evaporation of Different Copper Nanotip Structures under High Electric Field Based on Electrodynamics – Molecular Dynamics Simulations

Effect Of Electrode Materials On The Vacuum Breakdown Behaviors At Nanoscale

Thermal and Voltage Instabilities of Hafnium Oxide Films Prepared by Sputtering Technique

Role of Thermal Properties of Cathode Materials for the Nanoscale Breakdown in Vacuum

Thermal Stability and High-Temperature Photoluminescence of Chemical Vapor Deposited MoS2 in Different Atmosphere

In situ TEM investigation of Xe ion irradiation induced defects and bubbles in pure molybdenum single crystal

Thermal Stability of Titanium Contacts to MoS2

Mechanism Responsible For Initiating Carbon Nanotube Vacuum Breakdown

Nanoindentation of single crystalline Mo: Atomistic defect nucleation and thermomechanical stability

Thermal conductivity of molybdenum disulfide nanotube from molecular dynamics simulations