Anodic oxidation of polycrystalline 3C-silicon carbide thin films during MEMS operation

F Liu,C S Roper,I Laboriante,B Bush,J R Chu,C Carraro,R Maboudian
DOI: https://doi.org/10.1088/0960-1317/19/3/035024
2009-02-23
Journal of Micromechanics and Microengineering
Abstract:In this paper, we provide the first report of corrosion occurring at the anode of polycrystalline 3C-silicon carbide MEMS electrodes under high relative humidity and applied voltage. This unusual phenomenon is determined to be electrochemical in nature. Electrode pair and canary wire corrosion behavior are investigated to yield a detailed evaluation of the stability and oxidation rate during corrosion. The effects of film stress on anodic oxidation are discussed, and suggestions to prevent damage due to corrosion are presented.
engineering, electrical & electronic,nanoscience & nanotechnology,instruments & instrumentation,physics, applied
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