Research Progress of 3C-SiC: Preparation by CVD and Application in MEMS

Zhang Deke
Abstract:The monitoring and control systems applied in severe environments,e.g.high temperature,intense shock/vibration,erosive flow,corrosive media,and high moisture,have put forward many challenges for MEMS technology.Silicon carbide(SiC) is a material with very attractive properties for MEMS used in hash environments.Its exceptional properties such as chemical inertness,high thermal conductivity,favorable electrical properties,mechanical strength,and ability to operate at high temperature make it a competitive alternative to Si-based MEMS.A review on the progress of 3C-SiC film involving CVD preparation method,investigations of mechanical and electrical properties is presented.Finally,current status of research on 3C-SiC MEMS devices is introduced and a few examples are given.
Materials Science,Engineering
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